In order to accelerate the matching and locating speed of multiple circuit cell templates which are all similar to each other in integrate circuit (IC) micro images

a fast multiple template matching algorithm based on the uniform grid structure of IC image is proposed. First

the binary topological structure of the original image and multiple templates is decimated base on their uniform grid structure

and the decimated binary topological structure is the coarse resolution representation of the original image and templates. Second

a synthesis strategy is designed to construct a binary tree model of multiple templates' topological structure. Third

the tree model is applied to search in the coarse resolution images

and the binary tree decision is used to recognize multiple templates during the search. Finally

the matched targets in the coarse resolution image are guided to a small region of the original image. The corresponding original template is matched on that region for the true target and exact position. This algorithm is tested with IC micro images database. It shows that the proposed multiple templates binary tree model and the decimation of topological structure can highly increase the matching speed and the efficiency of the cells matching and location system. Compare to searching multiple templates sequentially on the original images

the speed up factor of binary tree model is very high.