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    • Survey of semiconductor wafer defect detection method based on machine vision

    • Vol. 30, Issue 1, Pages: 25-50(2025)   

      Received：01 February 2024，

      Revised：2024-04-29，

      Published：16 January 2025

    • DOI： 10.11834/jig.240053     

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  • Hu Zhiqiang， Wu Yiquan. 2025. Survey of semiconductor wafer defect detection method based on machine vision. Journal of Image and Graphics， 30(01):0025-0050 DOI： 10.11834/jig.240053.
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College of Information Science and Electronic Engineering， Zhejiang University
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